For precision instrument builders who need smooth motion in a small package, the (mSR) is a linear positioner that provides sub-micron level precision, in two drifferent form factors (80 and 100). The mSR series is a precision machined, square rail bearing guided linear positioner which is driven with a linear servo motor, and utilizes selectible levels of linear encoders technology confi gured to match the application need.
The precision grade mSR is the most accurate standard positioner ever made by Parker Electromechanical achieveing a repeatability of +/- 0.1 µm.
These positioners are ideal for vareity of applications ranging from imaging systems in digital pathology equipment, to metrology instruments in semiconductor or electronics manufacturing.
Two product form factors - 80mm and 100mm Wide
Dual precision, square rails
Six different linear encoder options - Incremental, Analog Sin/Cosine, and BiSS-C Absolute
Two linear motor technologies - Ironcore and Ironless linear motor
