High Precision Miniature Direct Drive Rotary Stage
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The mPR is driven with a direct drive, 3 phase AC servo motor which is integrated directly with the products Aluminum base. The direct drive eliminates mechanical compliance, which might exist from gearing or screw driven devices. As a result, the mPR delivers excellent angular dynamic response, and high precision rotary positioning. The combination of these features makes the mPR the ideal stage for applications in laser processing, electronics manufacturing, semiconductor inspection, and high precision metrology.
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